PROVIDING NEW CAPABILITY THROUGH INNOVATIVE ENGINEERING
Home172 nm StripWet ProcessHeated RinseTest DataEmail Me

3rd Party Test Results
HEATED RINSE PROVIDES DEFECT REDUCTION AND OR SHORTER RINSE TIMES.

3rd Party Test #1

This Pattern Defect information was provided by an Independent 3rd Party. The data shows the effect of a heated rinse (36 C) vrs standard (21 C) at 20, 40, 60, and 80 second intervals. The resist was DUV on 200 mm substrates. Download TFS_Pattern_Defect_Study_.pdf

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