3rd Party Test Results
HEATED RINSE PROVIDES DEFECT REDUCTION AND OR SHORTER RINSE TIMES.
3rd Party Test #1
This Pattern Defect information was provided by an Independent 3rd Party. The data shows the effect of a heated rinse (36 C) vrs standard (21 C) at 20, 40, 60, and 80 second intervals. The resist was DUV on 200 mm substrates.
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3rd Party Test #2
This Unexposed Resist Defect information was provided by an Independent 3rd Party. The data shows the effect of a heated rinse (36 C) vrs standard (21 C) at 20, 40, 60, and 80 second intervals. The resist was DUV on 200 mm substrates.
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3rd Party Test #3
This information was provided by an Independent 3rd Party. This data is based on a very short rinse time (20 seconds) which was known to cause defects. The resist was DUV on 200 mm substrates. This data shows a comparison of 21 C (std), 36 C, and 46C and the associated effectivness of defect removal.
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